Definition of: feature size

Definition of: feature size 

The size of the elements on a chip, which is designated by the "DRAM half pitch." The smallest feature size is generally smaller than the feature size for a technology generation (technology node). For example, the 180 nm technology generation will have gate lengths smaller than 180 nm.

Definition of: DRAM half pitch 

The common measure of the technology generation of a chip. It is half the distance between cells in a dynamic RAM memory chip. For example, in 2002, the DRAM half pitch had been reduced to 130 nm (.13 micron). By 2006, it had shrunk to 65 nm (.065 micron).

source :http://www.pcmag.com/encyclopedia_term/0,2542,t=feature+size&i=43075,00.asp